Article Details
  • Published Online:
    April  2025
  • Product Name:
    The IUP Journal of Electrical & Electronics Engineering
  • Product Type:
    Article
  • Product Code:
    IJEEE020425
  • DOI:
    10.71329/IUPJEEE/2025.18.2.28-53
  • Author Name:
    Nabeel Ahmad Khan Jadoon, Ashutosh Sharma and Vaigunthan Puvanenthiram
  • Availability:
    YES
  • Subject/Domain:
    Engineering
  • Download Format:
    PDF
  • Pages:
    28-53
Volume 18, Issue 2, April 2025
Design and Analysis of Accelerometer MEMS for Range of Motion Applications
Abstract

This paper introduces a differential capacitance accelerometer principle, implementation of a reference design, and its modification to meet the specifications defined for range of motion (ROM) analysis application. The modified design is analyzed for its structural and operational stability and evaluated against the design specifications and standard design criteria. With the proposed model, sensitivity of 4.62 fF/g was achieved at around 15 mV/g voltage sensitivity.

Introduction

Accelerometer, as a Micro-Electro-Mechanical Systems (MEMS) device, is a critical sensor in consumer products like smartphones, activity trackers and automotive applications.